Experience Agilent quality and a vibration-free experience, on your SEM/TEM equipment.

No matter the brand or type,  Agilent is capable to provide a winning Turbo pump and Ion pump solution for your equipment, thanks to its 50 years of experience in SEM pumping solutions.



SEM Turbo Pumps with Vibration Isolation

●    Proprietary vibration isolation systems
●    No Oil
●    Low vibration
●    No magnetic stray field
●    Lowest cost of ownership
●    Electrically isolated Damping System
●    No ground loops across pump
●    Perfect SEM image


SEM Dry Scroll Pumps

●    New Agilent IDP-15 Dry Scroll Pump: low noise and low vibration operation, and rapid pump-down deliver state-of-the-art vacuum value
●    Agilent SH-110 scroll pump
●    Agilent TriScroll 300 and TriScroll 600, now available with variable speed control:
    - low acoustic noise
    - low vibration
    - unmatched vacuum performances
●    New Agilent IDP-3 Dry Scroll Pump: the most compact and quiet scroll pump on the market



SEM Ion Pumps

●    Small footprint
●    Virtually zero leakage current
●    Buit-in optical baffle
●    Optional magnetic shields
●    Safety interlock feedthrough
●    Available in round shape for perfect mass balancing and minimum
magnetic stray field
●    ICPU-3 3-channel controller
●    New 4UHV controller: operates up to 4 pumps of any size, simultaneously and independently




The TwisTorr 84 FS and 304 FS Brochure The new generation Turbo Pumps with Agilent Floating Suspension.


Technical Overview


Vacuum Solutions
Designed for SEM /
TEM Microscopes Technical Overview


Variable Speed Dry Pumps for Electron Microscopes Technical Overview
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